3D Profilometry Using a Dynamically Configurable Confocal Microscope
نویسندگان
چکیده
منابع مشابه
Nontranslational three-dimensional profilometry by chromatic confocal microscopy with dynamically configurable micromirror scanning.
A confocal microscope profilometer, which incorporates chromatic depth scanning with a diffractive optical element and a digital micromirror device for configurable transverse scanning, provides three-dimensional (3D) quantitative measurements without mechanical translation of either the sample or the microscope. We used a microscope with various objective lenses (e.g., 40x, 60x, and 100x) to a...
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